Logarithmic instruments for analysis of the current-voltage characteristics of semiconductor devices

Two instruments for current-voltage measurements in semiconductor devices are described. The first one is designed to monitor semilogarithmic current-voltage curves for currents ranging from 10-(12) to 10(-1) A. It can be operated both in the normal mode with a constant sweep voltage steepness and in a mode with the sweep voltage steepness proportional to the current measured. The latter mode allows an approximately tenfold reduction in the current-voltage measurement time. The: second instrument is designed to measure the m factor, which characterizes the distortion of exponential current-voltage curves as a function of voltage or current across the tested unit. When the m factor is measured for currents ranging from 10(-11) to 10(-1) A, the measurement error does not exceed 2%. The steepness of the voltage ramp applied to the tested unit is 10 mV/s.