Microanalyses on the hydrogen permeated 70% SiC-C films

被引：5

作者：

Huang, NK ^{[1
]}

Wang, DZ ^{[1
]}

Liu, YG ^{[1
]}

Liu, JR ^{[1
]}

机构：

[1] Sichuan Univ, Inst Nucl Sci & Technol, Key Lab Radiat Phys & Technol, Educ Minist China, Chengdu 610064, Peoples R China

来源：

MATERIALS RESEARCH BULLETIN | 2004年 / 39卷 / 01期

基金：

中国国家自然科学基金;

关键词：

carbides; thin films; hydrides;

D O I：

10.1016/j.materresbull.2003.08.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SiC-C films with content of 70% SiC were deposited by rf magnetron sputtering on stainless steel or NaCl substrate followed by argon ion bombardment. Samples were then submitted to hydrogen permeation at 3.23 x 10(7) Pa and 500 K for 3 h. Secondary ion mass spectroscopy (SIMS) was used to analyze hydrogen concentration with depth and to check the formation of hydrogen related bonds in the SiC-C films with IR measurement. Auger electron spectra (AES) and X-ray photoelectron spectra (XPS) were carried out to check the effects of hydrogen participation on shifts of chemical bonding states of C, Si and 0 contamination. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：109 / 117

页数：9

共 13 条

[1] Laser-induced chemical vapor deposition of nanostructured silicon carbonitride thin films [J].

Besling, WFA ;

Goossens, A ;

Meester, B ;

Schoonman, J .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (01) :544-553

[2] Hydrogen flip model for light-induced changes of amorphous silicon [J].

Biswas, R ;

Li, YP .

PHYSICAL REVIEW LETTERS, 1999, 82 (12) :2512-2515

[3]

BUTTOT J, 1987, PHYS STATUS SOLIDI B, V143, P345

[4]

JONES RH, 1992, J NUCL MATER, V191, P75

[5] SURFACE-COMPOSITION OF SIC AFTER ION-BOMBARDMENT, ANNEALING, AND EXPOSURE TO OXYGEN [J].

JORGENSEN, B ;

MORGEN, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1701-1704

[6] XPS STUDY OF A SIC FILM PRODUCED ON SI(100) BY REACTION WITH A C2H2 BEAM [J].

KUSUNOKI, I ;

IGARI, Y .

APPLIED SURFACE SCIENCE, 1992, 59 (02) :95-104

[7] SPECTROSCOPIC CHARACTERIZATION OF THERMALLY TREATED CARBON-RICH SI1-XCX FILMS [J].

LAIDANI, N ;

CAPELLETTI, R ;

ELENA, M ;

GUZMAN, L ;

MARIOTTO, G ;

MIOTELLO, A ;

OSSI, PM .

THIN SOLID FILMS, 1993, 223 (01) :114-121

[8] Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering [J].

Lutz, H ;

Bruns, M ;

Link, F ;

Baumann, H .

THIN SOLID FILMS, 1998, 332 (1-2) :230-234

[9] CHEMICAL AND COMPOSITIONAL CHANGES INDUCED BY ION-IMPLANTATION IN SIC AND RESULTING HYDROGEN PERMEATION PROPERTIES [J].

MIOTELLO, A ;

KELLY, R ;

LAIDANI, N .

SURFACE & COATINGS TECHNOLOGY, 1994, 65 (1-3) :45-56

[10] CHARACTERIZATION OF BETA-SIC SURFACES AND THE AU/SIC INTERFACE [J].

MIZOKAWA, Y ;

GEIB, KM ;

WILMSEN, CW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1696-1700

← 1 2 →