共 50 条
- [21] REACTIVE MAGNETRON SPUTTER-DEPOSITION OF NIOBIUM NITRIDE FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1528 - 1533
- [22] EFFECTS OF DC BIAS VOLTAGE IN SPUTTER-DEPOSITION OF YBACUO FILMS PHYSICA C, 1994, 235 : 671 - 672
- [24] SUBSTRATE AMORPHIZATION INDUCED BY THE SPUTTER-DEPOSITION PROCESS - GEOMETRICAL ASPECTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (02): : 394 - 399
- [26] FLUX DISTRIBUTIONS AND DEPOSITION PROFILES FROM HEXAGONAL COLLIMATORS DURING SPUTTER-DEPOSITION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (04): : 2183 - 2188
- [30] Reactive sputter-deposition of AlN films by dense plasma focus JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (06): : 2122 - 2127