Optimized Monolithic 2-D Spin-Valve Sensor for High-Sensitivity Compass Applications

被引:20
作者
Ueberschaer, Olaf [1 ]
Almeida, Maria J. [1 ,2 ]
Matthes, Patrick [3 ]
Mueller, Mathias [4 ]
Ecke, Ramona [1 ]
Rueckriem, Robert [3 ]
Schuster, Joerg [1 ]
Exner, Horst [4 ]
Schulz, Stefan E. [1 ]
机构
[1] Fraunhofer Inst Elect Nano Syst, D-09107 Chemnitz, Germany
[2] Tech Univ Chemnitz, Ctr Microtechnol, D-09107 Chemnitz, Germany
[3] Tech Univ Chemnitz, Inst Phys, D-09107 Chemnitz, Germany
[4] Laserinstitut Hsch Mittweida, D-09648 Mittweida, Germany
关键词
Electronic compass; giant magnetoresistance (GMR); multiaxis magnetic sensor; spin valve (SV); GIANT MAGNETORESISTANCE;
D O I
10.1109/TMAG.2014.2358802
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have designed and fabricated 2-D giant magnetoresistance spin-valve sensors on the basis of exchange-biased NiFe-CoFe/Cu/CoFe/IrMn nanolayers in monolithic integration for high-sensitivity compass applications. For a maximum signal-to-noise ratio, we have realized a focused double full-bridge layout with an antiparallel alignment of the pinned layer magnetization for neighboring meanders. This precise alignment is achieved with microscopic resolution by laser heating and subsequent in-field cooling. Striving for high-signal sensitivity and low hysteresis, we study in detail how the geometry of the constituent single meanders influences their magnetic structure and the resulting electronic transport properties. The investigated geometrical parameters include stripe width, stripe length, U-turn material, and total meander length. Moreover, the influence of the relative alignment between reference magnetization and shape anisotropy is studied. We compare our experimental results to the predictions of tailored micromagnetic simulations. Applying the best-suited meander geometry, we demonstrate how the developed 2-D sensor may be readily employed to determine the direction of small magnetic fields, such as that of the Earth, as a 2-D vector with high spatial (similar to 1 mm) and temporal (similar to 1 ms) resolution.
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页数:4
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