Fabrication of waveguides in Yb:YCOB crystal by MeV oxygen ion implantation

被引：1

作者：

Jiao, Yang ^{[1
]}

Chen, Feng

Wang, Xue-Lin

Wang, Ke-Ming

Wang, Lei

Wang, Liang-Ling

Zhang, Huai-Jin

Lu, Qing-Ming

Ma, Hong-Ji

Nie, Rui

机构：

[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China

[2] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China

[3] Shandong Univ, Sch Chem & Chem Engn, Jinan 250100, Peoples R China

[4] Peking Univ, Minist Educ, Key Lab Heavy Ion Phys, Beijing 100871, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 18期

基金：

中国国家自然科学基金;

关键词：

ion implantation; optical waveguide; Yb : YCOB crystal;

D O I：

10.1016/j.apsusc.2007.03.021

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Oxygen ions with energies of 6.0 or 3.0 MeV were implanted into y-cut Yb:YCOB crystals at fluences ranging from 5.0 x 10(13) to 2.0 x 10(15) ions/cm(2) at room temperature, forming optical planar waveguide structures. Dark-mode line spectroscopy was applied at two wavelengths, 633 and 1539 nm, in various excitation configurations, showing strong enhancement of one of the indices (n(x)) in the implanted near surface. The n(x) refractive index profile is reconstructed by a reflectivity calculation method and compared to the ion energy losses profiles deduced from SRIM-code simulation. Moreover, the near-field patterns were imaged by an end-fire coupling arrangement. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：7360 / 7364

页数：5

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