Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma

被引:5
作者
Akatsuka, Hiroshi [1 ,2 ]
Shibata, Tomohiko [2 ]
Nezu, Atsushi [1 ]
机构
[1] Tokyo Inst Technol, Nucl Reactors Res Lab, Meguro Ku, 2-12-1-N1-10 Ookayama, Tokyo 1528550, Japan
[2] Tokyo Inst Technol, Dept Energy Sci, Meguro Ku, 2-12-1-N1-10 Ookayama, Tokyo 1528550, Japan
基金
日本学术振兴会;
关键词
nitrogen plasma; atomic and molecular processes; excited-state population; electron energy distribution function; nitrogen vibrational distribution function; optical emission spectroscopy; ELECTRON-TEMPERATURE; SPECTROSCOPIC MEASUREMENT; JET;
D O I
10.1002/tee.22230
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A numerical model is constructed to calculate the number densities of some excited species of nitrogen in low-pressure discharge nitrogen plasma, together with simultaneous solution of the self-consistent electron energy distribution function and N-2-vibration distribution function. We consider species N-2(X), N-2(A), N-2(B), N-2(C), N-2(a), N-2(a'), N-2(+), N-4(+), N(S-4) and e(-). In addition to electron collisional reactions, diffusion losses and molecular relations are included. It is found that the ratio of number densities of N-2(B) and N-2(C) states can be a good measure of the electron kinetic temperature. The N-2(C) state is found to be almost in a corona equilibrium, whereas the N-2(B) state becomes mainly populated by N-2(X, v >= 6) + N-2(A) reaction and depopulated by collisional relaxation by the ground-state N-2(X) molecule. (C) 2016 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
引用
收藏
页码:S9 / S18
页数:10
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