Precision tracking control of a piezoelectric-actuated system

被引：0
作者：
Shen, Jing-Chung [1 ]
Jywe, Wen-Yuh [1 ]
Chiang, Huan-Keng [2 ]
Shu, Yu-Ling [2 ]
机构：
[1] Natl Formosa Univ, Dept Automat Engn, Huwei 632, Yunlin, Taiwan
[2] Natl Yunlin Univ Sci & Technol, Dept Elect Engn, Touliu, Yunlin, Taiwan
来源：
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2008年 / 32卷 / 02期
关键词：
piezoelectric actuator; nano-positioning; sliding-mode control; tracking control;
D O I：
10.1016/j.precisioneng.2007.04.002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl-Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. (C) 2007 Elsevier Inc. All rights reserved.
引用
收藏
页码：71 / 78
页数：8
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