A Two-Layer Linear Piezoelectric Micromotor

被引：38
作者：
Li, Xiaotian [1 ]
Ci, Penghong [1 ]
Liu, Guoxi [1 ]
Dong, Shuxiang [1 ]
机构：
[1] Peking Univ, Dept Mat Sci & Engn, Coll Engn, Beijing 100871, Peoples R China
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2015年 / 62卷 / 03期
基金：
中国国家自然科学基金;
关键词：
NON-AXISYMMETRICAL MODE; ULTRASONIC MOTOR; STEPPER MOTOR; VIBRATION; DIAMETER; ACTUATOR; SIZE; MM;
D O I：
10.1109/TUFFC.2014.006796
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A first bending (B-1) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for micro-optics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr, Ti)O-3 (PZT-5) plates, with overall dimensions and mass of only 2.0 x 2.0 x 5.0 mm(3) and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linear motion. A large thrust of up to 0.30 N, which corresponds to a high unit volume direct driving force of 15 mN/mm(3), and a linear movement velocity of up to 230 mm/s were obtained under an applied voltage of 80 V-pp at the B-1 mode resonance frequency of 174 kHz.
引用
收藏
页码：405 / 411
页数：7
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