Composite chemical sensors based on carbon-filled patterned negative resists

被引:3
作者
Chatzandroulis, Stavros [1 ]
Andreadis, Nikolaos
Goustouridis, Dimitrios
Quercia, Luigi
Raptis, Ioannis
Beltsios, Konstantinos
机构
[1] NCSR Demokritos, Inst Microelect, Athens 15310, Greece
[2] Univ Ioannina, Dept Mat Sci & Engn, GR-45110 Ioannina, Greece
[3] ENEA, Ctr Ric Portici, I-80055 Portici, Italy
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 9B期
关键词
conductometric sensors; sensor array; carbon black composites; lithography; percolation phenomena;
D O I
10.1143/JJAP.46.6423
中图分类号
O59 [应用物理学];
学科分类号
摘要
Conductometric chemical sensors based on polymer composite films, synthesized by adding conductive fillers to the polymer solutions and deposited between two predefined electrodes, are well established. Deposition of the sensitive composites is usually applied to sensor devices by solvent casting methods such as spin coating, spray coating and drop casting. These methods lack in pattern precision and repeatability. In order to overcome pertinent problems the application of conventional patterning methods for the fabrication of the conductive sensing array is proposed. In this work, we present the deposition of two conductive polymer composites poly(dimethylsiloxane)/carbon black and epoxy polymer/carbon black on the same substrate. Each polymer composite is deposited onto two respective electrodes, effectively creating a conductive polymer chemical sensor pair. The two sensors performance is evaluated and considered as a first step towards the fabrication of a conductometric polymer composite array. Electrical vs dimensional sensitivity issues and the significance of electrode configuration are considered.
引用
收藏
页码:6423 / 6428
页数:6
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