Thin film microbatteries prepared by pulsed laser deposition

There is a growing interest in thin film microbatteries due to miniaturization of electronic devices. The reduction in current and power consumptions of electronic devices makes microbatteries possible as power sources. Hence, if micro-scale thin-film batteries are to be developed, a suitable fabrication processing technique for thin-film cathodes, anodes and electrolytes becomes crucial. Among various thin film deposition techniques, pulsed laser deposition (PLD) is a relatively flexible and powerful technique for preparing high quality and dense thin-film electrodes on a laboratory scale. This paper reviews recent developments in the fabrication of thin-film electrodes by using PLD.