Optical parameters of Diamond Films Determined by Spectroscopic Ellipsometry Method

被引：0
|
作者：
Pan, Xiaoyu [1 ]
Wang, Linjun [1 ]
Huang, Jian [1 ]
Tang, Ke [1 ]
Bi, Mei [1 ]
Shi, Weimin [1 ]
Xia, Yiben [1 ]
机构：
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China
来源：
RENEWABLE AND SUSTAINABLE ENERGY, PTS 1-7 | 2012年 / 347-353卷
关键词：
Diamond film; Optical parameter; spectroscopic ellipsometry;
D O I：
10.4028/www.scientific.net/AMR.347-353.3468
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
Diamond film can be used as optical window materials, mask materials and coating materials of optical device and solar cells. Diamond films with different thickness were prepared by HFCVD method. Raman scattering measurement, SEM and AFM show a good diamond character. Optical parameters in infrared region, such as refractive index (n) and extinction coefficient (k) of diamond films with different thickness were determined by spectroscopic ellipsometry method with a proper fitting model.
引用
收藏
页码：3468 / 3471
页数：4
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