Wireless remotely readable microaccelerometer

The integration of MEMS, SAW devices and required microelectronics is presented in this paper. This unique combination of technologies results in a novel sensor that can be remotely sensed by a microwave system with the advantage of no power requirements or very low power requirements. Such a device is readily compatible with existing Antenna technologies as the SAW device operates at 1 GHz. The microaccelerometer presented is simple in construction and easy to manufacture with existing silicon micromachining techniques. Depending on the application certain design parameters can be modified to achieve the desired sensitivity. Similar modifications in the microelectronics can also be envisioned. A fabrication method to produce such a device is also presented. The relatively small size of the sensor makes it an ideal conformal sensor The accelerometer finds application as air bag deployment sensors, vibration sensors for noise control, deflection and strain sensors, inertial and dimensional positioning systems, ABS/traction control, smart suspension, active roll stabilization and four wheel steering.