Nucleation of silicon on Si3N4 coated SiO2

被引:21
作者
Brynjulfsen, I. [1 ]
Arnberg, L. [1 ]
机构
[1] Norwegian Univ Sci & Technol, Dept Mat Sci & Engn, N-7491 Trondheim, Norway
关键词
Nucleation; Solidification; Undercooling; Silicon; FACETED DENDRITE GROWTH; POLYCRYSTALLINE SILICON; MULTICRYSTALLINE SILICON; IMPURITIES; TRANSITION; BEHAVIOR; INGOTS; MELT;
D O I
10.1016/j.jcrysgro.2011.07.003
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Control of the nucleation during directional solidification of solar cell silicon is important in order to be able to control the growth and number of grains formed. A certain amount of undercooling is required to obtain dendritic growth with faceted twins (which has shown promising results for structure control), but a too high undercooling will lead to extensive nucleation which will oppose the positive effect of a small number of large grains with controlled growth directions. In the present experiments, the nucleation undercooling of silicon on Si3N4 coated SiO2 with variation in coating parameters has been investigated. Experiments were performed with the sessile drop method, and with differential thermal analysis, with a cooling rate of 20 K/min. There were no significant differences in nucleation undercooling between the different variations in coating. The undercooling does not seem to be dependent on coating thickness, oxygen concentration, wetting angle or roughness at the given cooling rate. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:64 / 67
页数:4
相关论文
共 50 条
[41]   A study on devitrification and nucleation of calcium phosphate glass with Si3N4 additive [J].
Hsu, CK .
THERMOCHIMICA ACTA, 2002, 392 :169-172
[42]   Highly selective SiO2 etching over Si3N4 using a cyclic process with BCl3 and fluorocarbon gas chemistries [J].
Matsui, Miyako ;
Kuwahara, Kenichi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (06)
[43]   Achieving ultrahigh etching selectivity of SiO2 over Si3N4 and Si in atomic layer etching by exploiting chemistry of complex hydrofluorocarbon precursors [J].
Lin, Kang-Yi ;
Li, Chen ;
Engelmann, Sebastian ;
Bruce, Robert L. ;
Joseph, Eric A. ;
Metzler, Dominik ;
Oehrlein, Gottlieb S. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (04)
[44]   Electrochemical Properties of Nitride Phases in the Si3N4–Ca3N2and Si3N4–AlN–Ca3N2Systems [J].
S. F. Pal'guev ;
R. P. Lesunova ;
E. I. Burmakin ;
E. S. Korovenkova .
Inorganic Materials, 2001, 37 :684-687
[45]   Synthesis and Characterization of a Porous Silicon Filter with Si3N4 Whiskers [J].
Wong-Sifuentes, Milagros ;
Nanko, Makoto ;
Lira-Olivares, Joaquin .
DIFFUSION IN MATERIALS - DIMAT2008, 2009, 289-292 :185-+
[46]   Enhancement of thermal shock resistance in β-Si3N4 coating with in situ synthesized β-Si3N4 nanowires/nanobelts on porous Si3N4 ceramics [J].
Wang, Chao ;
Wang, Xu ;
Wang, Binglei ;
Xiao, Guozheng ;
Qiao, Ruiqing ;
Zhang, Fan ;
Bai, Yu ;
Li, Yizhuo ;
Wu, Yusheng ;
Wang, Zhanjie ;
Wang, Hongjie .
CERAMICS INTERNATIONAL, 2021, 47 (18) :25449-25457
[47]   Reduction of oxygen impurity at GaN/β-Si3N4/Si interface via SiO2 to Ga2O conversion by exposing of Si surface under Ga flux [J].
Kumar, Mahesh ;
Rajpalke, Mohana K. ;
Roul, Basanta ;
Bhat, Thirumaleshwara N. ;
Dash, S. ;
Tyagi, A. K. ;
Kalghatgi, A. T. ;
Krupanidhi, S. B. .
JOURNAL OF CRYSTAL GROWTH, 2011, 327 (01) :272-275
[48]   Growth of Si single bulk crystals with low oxygen concentrations by the noncontact crucible method using silica crucibles without Si3N4 coating [J].
Nakajima, Kazuo ;
Murai, Ryota ;
Morishita, Kohei ;
Kutsukake, Kentaro .
JOURNAL OF CRYSTAL GROWTH, 2013, 372 :121-128
[49]   High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si Part II:: sputtering yield transients, the approach to high-fluence equilibrium [J].
Zhang, YW ;
Winzell, T ;
Zhang, TH ;
Maximov, IA ;
Sarwe, EL ;
Graczyk, M ;
Montelius, L ;
Whitlow, HJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 159 (03) :133-141
[50]   Preparation and sintering of nano Fe coated Si3N4 composite powders [J].
Yin Rui-ming ;
Fan Jing-lian ;
Liu Xun .
JOURNAL OF CENTRAL SOUTH UNIVERSITY OF TECHNOLOGY, 2009, 16 (02) :184-189