Full 3D-3C velocity measurement inside a liquid immersion droplet

被引：31

作者：

Kim, Hyoungsoo ^{[1
]}

Grosse, Sebastian ^{[1
]}

Elsinga, Gerrit E. ^{[1
]}

Westerweel, Jerry ^{[1
]}

机构：

[1] Delft Univ Technol, Lab Aero & Hydrodynam, NL-2628 CA Delft, Netherlands

来源：

EXPERIMENTS IN FLUIDS | 2011年 / 51卷 / 02期

关键词：

PARTICLE; FLOW; VELOCIMETRY;

D O I：

10.1007/s00348-011-1053-y

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

We describe a tomographic PIV system for the measurement of the internal flow in a droplet over a stagnant and a moving surface. The flow condition is representative of the flow in an immersion droplet applied in a liquid immersion lithography machine. We quantify the accuracy and reliability of the measurements and compare the shape of the reconstructed measurement volume to shape measurements by means of shadowgraphy. First results indicate the internal flow pattern near the receding contact line, showing a small recirculation region.

引用

页码：395 / 405

页数：11

共 23 条

[1]

Adrian R. J., 2010, Particle Image Velocimetry

[2]

[Anonymous], 2008, DISSERTATION

[3]

[Anonymous], EXP FLUIDS

[4]

[Anonymous], P 1 EUR C MICR