Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field

被引：16

作者：

Su, Jingxiang ^{[1
]}

Niekiel, Florian ^{[1
]}

Fichtner, Simon ^{[1
,2
]}

Kirchhof, Christine ^{[2
]}

Meyners, Dirk ^{[2
]}

Quandt, Eckhard ^{[2
]}

Wagner, Bernhard ^{[1
,2
]}

Lofink, Fabian ^{[1
]}

机构：

[1] Fraunhofer Inst Silicon Technol ISIT, Fraunhoferstr 1, D-25524 Itzehoe, Germany

[2] Univ Kiel, Inst Mat Sci, Kaiserstr 2, D-24143 Kiel, Germany

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2020年 / 30卷 / 07期

关键词：

MEMS; magnetoelectric sensor; piezoelectric; frequency tuning; NOISE; SYSTEMS;

D O I：

10.1088/1361-6439/ab8dd0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on frequency tunable MEMS magnetoelectric (ME) sensors. Different designs are studied in respect to ME voltage coefficient and frequency tunability. Compared to state-of-the-art ME sensors, the presented ME resonators display a highly reversible and linear frequency tuning, enabled by applying a DC voltage to piezoelectric actuators. A frequency shift of up to 0.2 Hz V-1 is demonstrated for a sensor with a limit of detection of 128 pT/Hz(0.5) at resonance frequency of 13 kHz. This sensor type is of particular interest for vector field sensors and sensor arrays in bio-magnetic applications, where sensors with either identical resonance frequencies or precisely defined frequency spacing are required.

引用

页数：8

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