Electrical and optical properties of microwave dielectric thin films prepared by pulsed laser deposition

被引:0
作者
Chen, YC [1 ]
Cheng, HF
Lin, IN
机构
[1] Natl Taiwan Normal Univ, Dept Phys, Taipei 117, Taiwan
[2] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
关键词
microwave dielectric films; pulsed laser deposition; electrical and optical properties;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Bi-2(Zn1/3Nb2/3)(2)O-7, BiZN, materials possess high dielectric constant and low loss factor in microwave frequency region. They have good potential for device application, especially in the form of thin films. However, the microwave dielectric properties of a thin film are very difficult to be accurately measured. Evaluation on the dielectric behavior of the films through the performance of the microstrip line devices made of these films involves metallic conduction and stray field losses. A novel measuring technique, which can directly evaluate the microwave dielectric properties of a thin film is thus urgently needed. In this paper, BiZN thin films were grown on [100] MgO single crystal substrates using pulsed laser deposition process. The high-frequency dielectric properties of thus obtained thin films were determined using optical transmission spectroscopy (OTS). The [100] preferentially oriented films with pyrochlore structure can be obtained for the thin films deposited at 400-600 degreesC substrate temperature under 0.1 mbar oxygen pressure. OTS measurements reveal that the index of refraction (n = 1.95-2.35) and absorption coefficient (kappa = 0.28 x 10(-4)-2.25 x 10(-4) nm(-1)) of the films vary insignificantly with the crystallinity of the BiZN films.
引用
收藏
页码:725 / 735
页数:11
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