Effects of Inter-electrode Gap and Discharge Voltage on EUV Emission from Stainless Steel Vacuum Spark Plasma

被引：0
|
作者：
Saboohi, S. [1 ]
Yap, S. L. [1 ]
Chan, L. S. [1 ]
Wong, C. S. [1 ]
机构：
[1] Univ Malaya, Fac Sci, Dept Phys, Plasma Technol Res Ctr, Kuala Lumpur 50603, Malaysia
来源：
SAINS MALAYSIANA | 2012年 / 41卷 / 07期
关键词：
Extreme Ultra Violet (EUV); vacuum spark; LITHOGRAPHY; RADIATION; SPECTRA;
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10(-4) mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as similar to V-0(2), where V-0 is the discharge voltage.
引用
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页码：879 / 884
页数：6
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