Machined immersion grating with theoretically predicted diffraction efficiency

被引：27

作者：

Ikeda, Yuji ^{[1
,2
]}

Kobayashi, Naoto ^{[2
,3
]}

Sarugaku, Yuki ^{[9
]}

Sukegawa, Takashi ^{[5
]}

Sugiyama, Shigeru ^{[6
]}

Kaji, Sayumi ^{[7
]}

Nakanishi, Kenshi ^{[2
]}

Kondo, Sohei ^{[2
]}

Yasui, Chikako ^{[8
]}

Kataza, Hirokazu ^{[4
]}

Nakagawa, Takao ^{[4
]}

Kawakita, Hideyo ^{[2
,7
]}

机构：

[1] Photocoding, Sakyo Ku, Kyoto 6060025, Japan

[2] Kyoto Sangyo Univ, Koyama Astron Observ, Lab Infrared High Resolut Spect LIH, Kita Ku, Kyoto 6038555, Japan

[3] Univ Tokyo, Inst Astron, Mitaka, Tokyo 1810015, Japan

[4] Japan Aerosp Explorat Agcy, Inst Space & Astronaut Sci, Chuo Ku, Sagamihara, Kanagawa 2525210, Japan

[5] Canon Inc, Corp R&D Headquarters, Utsunomiya, Tochigi 3213298, Japan

[6] Canon Inc, Prod Engn Headquarters, Saiwai Ku, Kawasaki, Kanagawa 2128602, Japan

[7] Kyoto Sangyo Univ, Fac Sci, Kita Ku, Kyoto 6038555, Japan

[8] Univ Tokyo, Grad Sch Sci, Dept Astron, Bunkyo Ku, Tokyo 1130033, Japan

[9] Univ Tokyo, Inst Astron, Kiso Observ, Kiso, Nagano 3970101, Japan

来源：

APPLIED OPTICS | 2015年 / 54卷 / 16期

基金：

日本学术振兴会;

关键词：

SPECTROGRAPH; FABRICATION; PERFORMANCE;

D O I：

10.1364/AO.54.005193

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An immersion grating composed of a transmissive material with a high refractive index (n > 2) is a powerful device for high-resolution spectroscopy in the infrared region. Although the original idea is attributed to Fraunhofer about 200 years ago, an immersion grating with high diffraction efficiency has never been realized due to the difficulty in processing infrared crystals that are mostly brittle. While anisotropic etching is one successful method for fabricating a fine groove pattern on Si crystal, machining is necessary for realizing the ideal groove shape on any kind of infrared crystal. In this paper, we report the realization of the first, to the best of our knowledge, machined immersion grating made of single-crystal CdZnTe with a high diffraction efficiency that is almost identical to that theoretically predicted by rigorous coupled-wave analysis. (C) 2015 Optical Society of America

引用

页码：5193 / 5202

页数：10

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