New lamination technique to join ceramic green tapes for the manufacturing of multilayer devices

Lamination is a quality determining processing step in the manufacturing of ceramic multilayer devices. The common method to join stacked ceramic green tapes is thermo-compression. The binder phases of two adjacent green tapes are joined together at elevated temperatures and pressures. This causes mass flow, which prevents the production of complex 3D structures or fine patterns. The new lamination technique is based on a temporary gluing step. The green tapes are stuck together by an adhesive tape at room temperature under very low pressures. Even though the tapes are separated by the adhesive tape, the ceramic green tapes are joined homogeneously after sintering. In contrast to the thermo-compression method, the new cold low pressure lamination technique reduces deformations, and has a high potential for the lamination of undercut, complex 3D structures with small lines and spaces of the metallization. (C) 2001 Elsevier Science Ltd. All rights reserved.