Piezoelectric sensor using a porous alumina film covered with a catalytic material

This paper reports results of a basic study on SAW sensor with a porous alumina film whose surface is covered with a catalytic materials of Pt and Co. We investigated basic adhesive characteristics for CO, NO, and NH3 gas. In the sensor, we useed a fluorinated polyimide passivation film for protecting physical and chemical attack which may cause in a fabrication process and sensing operation. The result verified the high sensitive performance of the sensor and the effectiveness of of the passivation film. We also discussed requirement for applying the sensor on a mean to investigate catalytic phenomena.