Optical micro encoder with sub-micron resolution using a VCSEL

被引:26
作者
Miyajima, H [1 ]
Yamamoto, E [1 ]
Yanagisawa, K [1 ]
机构
[1] Olympus Opt Co Ltd, Tokyo 1928512, Japan
关键词
optical micro encoder; VCSEL; microlenses; directional sensing; linear stage; packaging;
D O I
10.1016/S0924-4247(98)00188-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An improved optical micro encoder using a vertical-cavity surface-emitting laser (VCSEL) is presented in this paper. A twin-beam VCSEL is used in order to obtain two quasi-sinusoidal signals in phase quadrature. Directional sensing and signal interpolation have become possible. Also, microlenses are monolithically integrated onto the VCSEL in order to improve resolution. The encoder chip size is approximately 1.5 x 2.0 x 0.6 mm(3). Displacement measurement is performed using a scale with a pitch of 20 mu m, and resolution of 0.1 mu m is achieved as a result of signal interpolation. Additionally, the encoder is installed into a low-height linear stage and characterized, demonstrating a possible application. A prototype of the packaged encoder is also presented. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:213 / 218
页数:6
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