Air Vortices and Nano-Vibration of Aerostatic Bearings

被引：73

作者：

Chen, Xuedong ^{[1
]}

Chen, Han ^{[1
,2
]}

Luo, Xin ^{[1
]}

Ye, Yixi ^{[1
]}

Hu, Yuantai ^{[2
]}

Xu, Jiaqiang ^{[3
]}

机构：

[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, Dept Mech, Sch Civil Engn & Mech, Wuhan 430074, Peoples R China

[3] Shanghai Univ, Dept Chem, Coll Sci, Shanghai 200444, Peoples R China

来源：

TRIBOLOGY LETTERS | 2011年 / 42卷 / 02期

关键词：

Aerostatic bearing; Air vortex; Vibration; Fluid mechanics methods; PERFORMANCE;

D O I：

10.1007/s11249-011-9761-2

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Small vibration on the order of nanometers poses challenges for the application of aerostatic bearings in ultra-precision machine tools and metrology equipments. In this article, the flow field in aerostatic bearings is numerically investigated and air vortices in the recess are analyzed. Vibration of the aerostatic bearing is also experimentally measured. Design and functioning parameters are varied to study their effects on the air vortices and nano-vibration of aerostatic bearings, and a direct relationship is established between the gas vortices and nano-vibration in aerostatic bearings. It is demonstrated that vibration energy of the aerostatic bearing increases with the strength of air vortices.

引用

页码：179 / 183

页数：5

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