Nanoimprint lithography and lithographically induced self-assembly

被引：80
|
作者：
Chou, SY [1 ]
机构：
[1] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
来源：
MRS BULLETIN | 2001年 / 26卷 / 07期
关键词：
D O I：
10.1557/mrs2001.122
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：512 / 517
页数：6
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