Nanoimprint lithography and lithographically induced self-assembly

被引：80
作者：
Chou, SY [1 ]
机构：
[1] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
来源：
MRS BULLETIN | 2001年 / 26卷 / 07期
关键词：
D O I：
10.1557/mrs2001.122
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：512 / 517
页数：6
相关论文
共 24 条
  • [1] Lithographically induced self-construction of polymer microstructures for resistless patterning
    Chou, SY
    Zhuang, L
    Guo, LJ
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (07) : 1004 - 1006
  • [2] Lithographically induced self-assembly of periodic polymer micropillar arrays
    Chou, SY
    Zhuang, L
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 3197 - 3202
  • [3] Imprint lithography with 25-nanometer resolution
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. SCIENCE, 1996, 272 (5258) : 85 - 87
  • [4] Sub-10 nm imprint lithography and applications
    Chou, SY
    Krauss, PR
    Zhang, W
    Guo, LJ
    Zhuang, L
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2897 - 2904
  • [5] DESHPANDE P, IN PRESS
  • [6] DESHPANDE P, 2000, 44 INT C EL ION PHOT
  • [7] Mold-assisted nanolithography: A process for reliable pattern replication
    Haisma, J
    Verheijen, M
    vandenHeuvel, K
    vandenBerg, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4124 - 4128
  • [8] HE L, IN PRESS
  • [9] Positioning of self-assembled, single-crystal, germanium islands by silicon nanoimprinting
    Kamins, TI
    Ohlberg, DAA
    Williams, RS
    Zhang, W
    Chou, SY
    [J]. APPLIED PHYSICS LETTERS, 1999, 74 (12) : 1773 - 1775
  • [10] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING
    KUMAR, A
    WHITESIDES, GM
    [J]. APPLIED PHYSICS LETTERS, 1993, 63 (14) : 2002 - 2004
123