Advances in micro and nano-scale surface metrology

被引：5

作者：

Blunt, L ^{[1
]}

Jiang, X

Scott, PJ

机构：

[1] Univ Huddersfield, Huddersfield HD1 3DH, W Yorkshire, England

[2] Taylor Hobson Ltd, Leicester, Leics, England

来源：

MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI | 2005年 / 295-296卷

关键词：

micro and nano scale; surface characterisation;

D O I：

10.4028/www.scientific.net/KEM.295-296.431

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

引用

页码：431 / 436

页数：6

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