Properties of low-temperature grown carbon nanotubes - art. no. 676809

被引：0
|
作者：
Guo, Kun [1 ]
Jayatissa, Ahalapitiya H. [1 ]
机构：
[1] Univ Toledo, Coll Engn, Dept Mech Ind & Mfg Engn, Toledo, OH 43606 USA
来源：
NANOMATERIALS SYNTHESIS, INTERFACING, AND INTEGRATING IN DEVICES, CIRCUITS, AND SYSTEMS II | 2007年 / 6768卷
关键词：
carbon nanotubes; CVD; filament; low temperature; catalyst;
D O I：
10.1117/12.735319
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The growth of carbon nanotubes was investigated using a hot filament assisted CVD system. The silicon and glass substrates coated with catalyst were kept in a CVD furnace tube and the carbon nanotubes were grown by a hot filament assisted decomposition of methane (CH4). Argon (Ar) was used as carrier for carbon. It was found that carbon nanotubes could be grown at as low as 400 degrees C by the hot filament CVD system. The properties of carbon nanotubes were characterized by scanning electron microscopy (SEM), transmission electronic microscopy (TEM), and Raman spectroscopy. Those carbon nanotubes have similar properties as grown at high temperature. This method has high reproducibility and controlling capability of nanotube growth at low temperature region.
引用
收藏
页码：76809 / 76809
页数：8
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