Thermal annealing effect on nanostructured TiO2 microsensors by supersonic cluster beam deposition

被引：10
作者：
Barborini, E
Bongiorno, G
Forleo, A
Francioso, L
Milani, P
Kholmanov, IN
Piseri, P
Siciliano, P
Taurino, AM
Vinati, S
机构：
[1] CNR, IMM, Ist Microelettron, Sez Lecce, I-73100 Lecce, Italy
[2] Univ Milan, INFM, Dipartimento Fis, I-20133 Milan, Italy
[3] Univ Milan, CIMAINA, I-20133 Milan, Italy
[4] Univ Cattolica Sacro Cuore, INFM, Dipartimento Matemat & Fis, I-25121 Brescia, Italy
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 111卷
关键词：
microfabrication; nanostructured materials; THIN-FILMS; SENSOR; SURFACES;
D O I：
10.1016/j.snb.2005.07.049
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：22 / 27
页数：6
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