Investigation on shape transferability in ultraprecision glass molding press for microgrooves

被引：66

作者：

Zhou, Tianfeng ^{[1
]}

Yan, Jiwang ^{[1
]}

Masuda, Jun ^{[2
]}

Oowada, Takashi ^{[1
]}

Kuriyagawa, Tsunemoto ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan

[2] Toshiba Machine Co Ltd, Numazu, Shizuoka 4108510, Japan

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2011年 / 35卷 / 02期

基金：

日本学术振兴会;

关键词：

Glass molding press; Microforming; Microgroove; Finite element method; Shape transferability;

D O I：

10.1016/j.precisioneng.2010.09.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Glass molding press (GMP) has been applied to produce the microgrooves on glass plates by using electroless-plated nickel phosphorus (Ni-P) molds. The GMP process for microgrooves was analyzed by finite element method (FEM) simulation. The effects of various pressing conditions, such as the molding temperature, the pressing velocity and the friction in glass deformation, were studied. Then, based on the simulation results, optimal pressing conditions were determined and used in the GMP experiments. By comparing the shape of the molded microgrooves with that of the corresponding microgrooves on the Ni-P mold, the shape transferability was evaluated and the reasons for form error were analyzed. The results show that the GMP process is an effective way to fabricate precision microgrooves on glass. (c) 2010 Elsevier Inc. All rights reserved.

引用

页码：214 / 220

页数：7

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