The investigation is aimed at elaboration of technology for submicron p(+) -GaAs layer formation on micro/nanotextured n-GaAs substrates by using low-temperature (550 degrees C) diffusion of zinc to take the advantage of optical and recombination properties of textured interface for solar cells. Process duration, surface microrelief morphology (dendrite or quasi-grating (grating-like)) and the substrate doping impurity concentration were varied. Optical, photoelectric and electrical properties of p(+) -n junction were studied to optimize the process conditions. The highest efficiency was obtained in structures with a quasi-grating surface microrelief, substrate doping close to N-d similar or equal to 10(17) cm(-3) and process duration about 45 min. (C) 2015 Elsevier B.V. All rights reserved.