Study of lithographically defined data track and servo patterns

被引:12
作者
Che, Xiaodong [1 ]
Moon, Ki-Seok
Tang, Yawshing
Kim, Na-Young
Kim, Soo-Youl
Lee, Hyung Jai
Moneck, Matthew
Zhu, Jian-Gang
Takahashi, Nobuyuki
机构
[1] Samsung Informat Syst Amer, San Jose, CA 95134 USA
[2] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
[3] Fuji Elect Device Technol Co Ltd, Nagano 3900821, Japan
关键词
electron beam lithography; patterned media; perpendicular magnetic recording; servo;
D O I
10.1109/TMAG.2007.908279
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on fabrication of discrete tracks on perpendicular magnetic recording (PMR) media with an e-beam lithographical process. We studied the recording performance of the e-beam media on a spinstand in parallel with conventional PMR media. Discrete track media show significant reduction in adjacent track erasure (ATE). We studied and quantitatively measured the source of the ATE improvement, and developed a triple track geometrical model to calculate achievable track density for both discrete track recording (DTR) and continuous media. From the model, we identify two factors of DTR that contribute to reaching a higher TPI. Using the same fabrication technique, we also studied servo burst design and its playback waveform quality. At 250 ktpi, we compare DTR servo bursts with servo bursts written with a conventional method. DTR servo bursts show better edge definition, which can translate to better position error signal sensitivity and support higher TPI in the future.
引用
收藏
页码:4106 / 4112
页数:7
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