Nonpolar vertical GaN-on-GaN p-n diodes grown on free-standing (10(1)over-bar0) m-plane GaN

被引:23
作者
Fu, Houqiang [1 ]
Zhang, Xiaodong [2 ]
Fu, Kai [1 ]
Liu, Hanxiao [3 ]
Alugubelli, Shanthan R. [3 ]
Huang, Xuanqi [1 ]
Chen, Hong [1 ]
Baranowski, Izak [1 ]
Yang, Tsung-Han [1 ]
Xu, Ke [2 ,4 ]
Ponce, Fernando A. [3 ]
Zhang, Baoshun [2 ]
Zhao, Yuji [1 ]
机构
[1] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
[2] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Suzhou 215123, Peoples R China
[3] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
[4] Suzhou Nanowin Sci & Technol Co Ltd, Suzhou 215123, Peoples R China
关键词
LIGHT-EMITTING-DIODES; YELLOW LUMINESCENCE; DOPED GAN; SCHOTTKY; VOLTAGE; KV;
D O I
10.7567/APEX.11.111003
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report nonpolar vertical GaN-on-GaN p-n diodes grown on rn-plane free-standing substrates. Cathodoluminescence measurements showed that the nonpolar p-GaN had a high quality with very few deep-level states. The device exhibited good rectifying behaviors with a turn-on voltage of 4.0 V, on-resistance of 2.3 m Omega.cm(2), and high on/off ratio of 10(10). The reverse current leakage was described by a trap-assisted space-charge-limited current conduction mechanism. The critical electrical field was calculated to be 2.0 MV/cm without field plates or edge termination. These results pave the way for development of novel nonpolar power electronics and polarization-engineering-related advanced power devices. (C) 2018 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 39 条
[1]   The 2018 GaN power electronics roadmap [J].
Amano, H. ;
Baines, Y. ;
Beam, E. ;
Borga, Matteo ;
Bouchet, T. ;
Chalker, Paul R. ;
Charles, M. ;
Chen, Kevin J. ;
Chowdhury, Nadim ;
Chu, Rongming ;
De Santi, Carlo ;
De Souza, Maria Merlyne ;
Decoutere, Stefaan ;
Di Cioccio, L. ;
Eckardt, Bernd ;
Egawa, Takashi ;
Fay, P. ;
Freedsman, Joseph J. ;
Guido, L. ;
Haeberlen, Oliver ;
Haynes, Geoff ;
Heckel, Thomas ;
Hemakumara, Dilini ;
Houston, Peter ;
Hu, Jie ;
Hua, Mengyuan ;
Huang, Qingyun ;
Huang, Alex ;
Jiang, Sheng ;
Kawai, H. ;
Kinzer, Dan ;
Kuball, Martin ;
Kumar, Ashwani ;
Lee, Kean Boon ;
Li, Xu ;
Marcon, Denis ;
Maerz, Martin ;
McCarthy, R. ;
Meneghesso, Gaudenzio ;
Meneghini, Matteo ;
Morvan, E. ;
Nakajima, A. ;
Narayanan, E. M. S. ;
Oliver, Stephen ;
Palacios, Tomas ;
Piedra, Daniel ;
Plissonnier, M. ;
Reddy, R. ;
Sun, Min ;
Thayne, Iain .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2018, 51 (16)
[2]  
[Anonymous], 2000, BLUE LASER DIODE COM
[3]   Single-crystal N-polar GaN p-n diodes by plasma-assisted molecular beam epitaxy [J].
Cho, YongJin ;
Hu, Zongyang ;
Nomoto, Kazuki ;
Xing, Huili Grace ;
Jena, Debdeep .
APPLIED PHYSICS LETTERS, 2017, 110 (25)
[4]   Lateral and Vertical Transistors Using the AlGaN/GaN Heterostructure [J].
Chowdhury, Srabanti ;
Mishra, Umesh K. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (10) :3060-3066
[5]   Crystallographic orientation dependence of dopant and impurity incorporation in GaN films grown by metalorganic chemical vapor deposition [J].
Cruz, Samantha C. ;
Keller, Stacia ;
Mates, Thomas E. ;
Mishra, Umesh K. ;
DenBaars, Steven P. .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (15) :3817-3823
[6]   Effects of macroscopic polarization in III-V nitride multiple quantum wells [J].
Fiorentini, V ;
Bernardini, F ;
Della Sala, F ;
Di Carlo, A ;
Lugli, P .
PHYSICAL REVIEW B, 1999, 60 (12) :8849-8858
[7]   Origin of high hole concentrations in Mg-doped GaN films [J].
Fischer, A. M. ;
Wang, S. ;
Ponce, F. A. ;
Gunning, B. P. ;
Fabien, C. A. M. ;
Doolittle, W. A. .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2017, 254 (08)
[8]   High Performance Vertical GaN-on-GaN p-n Power Diodes With Hydrogen-Plasma-Based Edge Termination [J].
Fu, Houqiang ;
Fu, Kai ;
Huang, Xuanqi ;
Chen, Hong ;
Baranowski, Izak ;
Yang, Tsung-Han ;
Montes, Jossue ;
Zhao, Yuji .
IEEE ELECTRON DEVICE LETTERS, 2018, 39 (07) :1018-1021
[9]   Ultra-low turn-on voltage and on-resistance vertical GaN-on-GaN Schottky power diodes with high mobility double drift layers [J].
Fu, Houqiang ;
Huang, Xuanqi ;
Chen, Hong ;
Lu, Zhijian ;
Baranowski, Izak ;
Zhao, Yuji .
APPLIED PHYSICS LETTERS, 2017, 111 (15)
[10]   Demonstration of AlN Schottky Barrier Diodes With Blocking Voltage Over 1 kV [J].
Fu, Houqiang ;
Baranowski, Izak ;
Huang, Xuanqi ;
Chen, Hong ;
Lu, Zhijian ;
Montes, Jossue ;
Zhang, Xiaodong ;
Zhao, Yuji .
IEEE ELECTRON DEVICE LETTERS, 2017, 38 (09) :1286-1289