Influence of near-surface graded-gap layers on electrical characteristics of MIS-structures based on MBE grown HgCdTe

被引:12
作者
Voitsekhovskii, A. V. [1 ]
Nesmelov, S. N. [1 ]
Dzyadukh, S. M. [1 ]
Varavin, V. S. [2 ]
Dvoretskii, S. A. [2 ]
Mikhailov, N. N. [2 ]
Sidorov, Yu G. [2 ]
Yakushev, M. V. [2 ]
机构
[1] Tomsk VV Kuibyshev State Univ, Tomsk 634050, Russia
[2] Russian Acad Sci, Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia
关键词
HgCdTe; MIS-structures; graded-gap layer;
D O I
10.2478/s11772-010-1029-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The paper examines influence of near-surface graded-gap layers on electrical characteristics of MIS-structures fabricated on heteroepitaxial Hg(1-x)Cd(x)Te films grown by molecular beam epitaxy (MBE). Two types of insulators, i.e., two-layer SiO(2)/Si(3)N(4) and anodic oxide films were used. As it is seen from the depth and width of the valley on the C-V characteristics, the capacitance is found to vary in a wide range, in contrast to the structures without graded-gap layers. It is shown that the graded-gap layer under MIS-structures with x = 0.22 effectively reduces the tunnelling generation via deep levels and increases a lifetime of minority carriers in the space charge region and its differential resistance. The properties of the HgCdTe-insulator interfaces are studied.
引用
收藏
页码:259 / 262
页数:4
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