Decrease of breakdown voltages for micrometer-scale gap electrodes for carbon dioxide near the critical point: Temperature and pressure dependences

被引:34
作者
Ito, T [1 ]
Fujiwara, H [1 ]
Terashima, K [1 ]
机构
[1] Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Kashiwa, Chiba 2778561, Japan
关键词
D O I
10.1063/1.1611283
中图分类号
O59 [应用物理学];
学科分类号
摘要
We performed measurements of breakdown voltages as a function of environmental pressure with 1-mum-gap tungsten electrodes for high-pressure carbon dioxide up to supercritical conditions at different temperatures (305.65, 308.15, and 313.15 K). Breakdown voltage curves exhibit an inflection at around 3 MPa and a drastic decrease near the critical point. The location of the drastic decrease shifts to the high-pressure range and the sharpness and depth decrease with increased temperature. The breakdown voltage in pressure environments higher than that at the inflection point was analyzed systematically using the Townsend theory and density fluctuations. Moreover, comparison with breakdown voltage measurements by 10-mum-gap electrodes indicates that one factor inducing the inflection and the decrease might be electron attachment to existing clusters in dense carbon dioxide. (C) 2003 American Institute of Physics.
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页码:5411 / 5413
页数:3
相关论文
共 17 条
[1]   Deposition of conformal copper and nickel films from supercritical carbon dioxide [J].
Blackburn, JM ;
Long, DP ;
Cabañas, A ;
Watkins, JJ .
SCIENCE, 2001, 294 (5540) :141-145
[2]   Isobaric heat capacities of carbon dioxide and argon between 323 and 423 K and at pressures up to 25 MPa [J].
Dordain, L ;
Coxam, JY ;
Quint, JR ;
Grolier, JPE ;
Lemmon, EW ;
Penoncello, SG .
JOURNAL OF SUPERCRITICAL FLUIDS, 1995, 8 (03) :228-235
[3]   Supercritical fluids as solvents for chemical and materials processing [J].
Eckert, CA ;
Knutson, BL ;
Debenedetti, PG .
NATURE, 1996, 383 (6598) :313-318
[4]   AN ACCURATE EQUATION OF STATE FOR CARBON-DIOXIDE [J].
HUANG, FH ;
LI, MH ;
LEE, LL ;
STARLING, KE ;
CHUNG, FTH .
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 1985, 18 (06) :490-496
[5]   Generation of micrometer-scale discharge in a supercritical fluid environment [J].
Ito, T ;
Terashima, K .
APPLIED PHYSICS LETTERS, 2002, 80 (16) :2854-2856
[6]   Application of microscale plasma to material processing [J].
Ito, T ;
Izaki, T ;
Terashima, K .
THIN SOLID FILMS, 2001, 386 (02) :300-304
[7]  
ITO T, 1999, P 14 INT S PLASM CHE, V2, P967
[8]   ELECTRON AND CATION-TRANSPORT IN GASEOUS CARBON-DIOXIDE - DENSITY AND TEMPERATURE EFFECTS [J].
JACOBSEN, FM ;
FREEMAN, GR .
JOURNAL OF CHEMICAL PHYSICS, 1986, 84 (06) :3396-3404
[9]   HOMOGENEOUS CATALYSIS IN SUPERCRITICAL FLUIDS [J].
JESSOP, PG ;
IKARIYA, T ;
NOYORI, R .
SCIENCE, 1995, 269 (5227) :1065-1069
[10]   HOMOGENEOUS CATALYTIC-HYDROGENATION OF SUPERCRITICAL CARBON-DIOXIDE [J].
JESSOP, PG ;
IKARIYA, T ;
NOYORI, R .
NATURE, 1994, 368 (6468) :231-233