Observations in ZnO Thin Films based Pressure Sensors

被引：0

作者：

Al Ahmad, Mahmoud ^{[1
]}

Al Taradeh, Nedal ^{[1
]}

机构：

[1] UAE Univ, Dept Elect Engn, POB 15551, Al Ain, U Arab Emirates

来源：

2015 IEEE 8TH GCC CONFERENCE AND EXHIBITION (GCCCE) | 2015年

关键词：

Characterizations; design rules; materials parameters; thin films; piezoelectricity; ZnO; DEVICES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

recently real time monitoring systems of pressure variations has received noticeable interest. This work highlights some important issues and summaries several observations in published Zinc Oxide (ZnO) thin films based pressure sensor (TFPS) structures. New models for IV curve, pressure-output voltage variations have been developed based on empirical observations. In addition, the relations between the capacitance, sensitivity and resistance versus pressure variations have been modeled with noticeable agreements between evaluated and experimental results.

引用

页数：5

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