Evaluation of a vibrating micromachined cantilever sensor for measuring the viscosity of complex organic liquids

被引：82

作者：

Agoston, A

Keplinger, F

Jakoby, B

机构：

[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

[2] AC2T Res GmbH, A-2700 Wr Neustadt, Austria

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

micromachined cantilever; viscosity sensor; oil viscosity;

D O I：

10.1016/j.sna.2005.02.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel micromachined viscosity sensor is evaluated in particular for measuring complex organic liquids with non-Newtonian behavior. The sensor contains a micromachined cantilever, which is electromagnetically driven by an ac current in a permanent magnetic field utilizing the Lorentz force. The change in the resonance frequency is monitored when the oscillating cantilever is immersed in a viscous liquid. This procedure can be used to determine the viscosity of the liquid. We evaluate the sensor for a series of test liquids in a wide viscosity range from 10 to 500 mm(2)/s and compare its performance to a conventional viscometer and to a microacoustic thickness shear mode (TSM) viscosity sensor. In particular, its behavior for non-Newtonian oil mixtures containing polymer-additives is considered. (C) 2005 Elsevier B.V. All rights reserved.

引用

页码：82 / 86

页数：5

共 12 条

[1]

AGOSTON A, 2004, 14 INT C TRIB JAN, V3, P1883

[2]

Jakoby B., 2002, Proceedings of IEEE Sensors 2002. First IEEE International Conference on Sensors (Cat. No.02CH37394), P1587, DOI 10.1109/ICSENS.2002.1037360

[3] THE QUARTZ RESONATOR - ELECTROCHEMICAL APPLICATIONS [J].