Formation of stacking faults containing microtwins in (111) chemical-vapor-deposited diamond homoepitaxial layers

被引:27
作者
Kasu, M
Makimoto, T
Ebert, W
Kohn, E
机构
[1] NTT Corp, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
[2] Univ Ulm, Dept Electron Devices & Circuits, D-89081 Ulm, Germany
关键词
D O I
10.1063/1.1622105
中图分类号
O59 [应用物理学];
学科分类号
摘要
Stacking faults containing microtwins in (111)-oriented diamond layers grown on a high-pressure high-temperature (HPHT)-synthesized diamond substrate by chemical vapor deposition start to form just on the substrate. The microtwins in the stacking faults form on the {(1) over bar 11} plane, not on the (111) substrate plane. To explain these results, we propose an atomic-scale model in which a foreign atom remains on the HPHT substrate surface and a C atom on the foreign atom cannot form a covalent bond with it. Therefore, twinning of the C atom occurs on the {(1) over bar 11} plane. The next C atoms bond with the twinned C atom in an untwinned (normal crystalline) relation. Consequently, the formation of stacking faults that contain microtwins occurs. (C) 2003 American Institute of Physics.
引用
收藏
页码:3465 / 3467
页数:3
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