RF small-signal analysis of Schottky-barrier p-MOSFET

被引:29
作者
Valentin, Raphael [1 ]
Dubois, Emmanuel [1 ]
Raskin, Jean-Pierre [2 ]
Larrieu, Guilhem [1 ]
Dambrine, Gilles [1 ]
Lim, Tao Chuan [1 ]
Breil, Nicolas [3 ]
Danneville, Francois [1 ]
机构
[1] Inst Elect Microelect & Nanotechnol, Ctr Nacl Rech Sci, Unite Mixte Rech 8520, F-59652 Villeneuve Dascq, France
[2] Catholic Univ Louvain, Microwave Lab, B-1348 Louvain, Belgium
[3] STMicroelect, F-38926 Crolles, France
关键词
high frequency (HF); MOSFETs; Schottky barrier (SB); silicon; silicon-on-insulator (SOI);
D O I
10.1109/TED.2008.919382
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a detailed RF study for source/drain Schottky-barrier (SB) MOSFETs. Using on-wafer S-parameters, high-frequency (HF) figures-of-merit (FoMs) and small-signal equivalent circuits (SSEC) are first extracted and discussed for a 120-nm-gate-length SB MOSFET. Then, using ac simulations, HF FoM's sensitivity along SB height and underlap length variations are subsequently presented. The whole study provides, for SB MOSFETs, a deep understanding of key ac-element (transconductances and capacitances) behavior as well as process-parameter optimization to achieve the best HF FoMs.
引用
收藏
页码:1192 / 1202
页数:11
相关论文
共 23 条
[1]  
[Anonymous], INT TECHNOLOGY ROADM
[2]   EFFECTIVE MASS AND INTRINSIC CONCENTRATION IN SILICON [J].
BARBER, HD .
SOLID-STATE ELECTRONICS, 1967, 10 (11) :1039-&
[3]  
BRACALE A, 2000, ANALOG INTEGRATED CI
[4]   MOSFET modeling into the ballistic regime [J].
Bude, JD .
2000 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 2000, :23-26
[5]   CARRIER MOBILITIES IN SILICON EMPIRICALLY RELATED TO DOPING AND FIELD [J].
CAUGHEY, DM ;
THOMAS, RE .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (12) :2192-+
[6]   Performance advantage of Schottky source/drain in ultrathin-body silicon-on-insulator and dual-gate CMOS [J].
Connelly, D ;
Faulkner, C ;
Grupp, DE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (05) :1340-1345
[7]   NORMALIZED THERMIONIC-FIELD (T-F) EMISSION IN METAL-SEMICONDUCTOR (SCHOTTKY) BARRIERS [J].
CROWELL, CR ;
RIDEOUT, VL .
SOLID-STATE ELECTRONICS, 1969, 12 (02) :89-&
[8]   What are the limiting parameters of deep-submicron MOSFETs for high frequency applications? [J].
Dambrine, G ;
Raynaud, C ;
Lederer, D ;
Dehan, M ;
Rozeaux, O ;
Vanmackelberg, M ;
Danneville, F ;
Lepilliet, S ;
Raskin, JP .
IEEE ELECTRON DEVICE LETTERS, 2003, 24 (03) :189-191
[9]   ELECTRONIC TRANSPORT-PROPERTIES OF EPITAXIAL ERBIUM SILICIDE SILICON HETEROSTRUCTURES [J].
DUBOZ, JY ;
BADOZ, PA ;
DAVITAYA, FA ;
CHROBOCZEK, JA .
APPLIED PHYSICS LETTERS, 1989, 55 (01) :84-86
[10]   High-speed Schottky-barrier pMOSFET with fT=280 GHz [J].
Fritze, M ;
Chen, CL ;
Calawa, S ;
Yost, D ;
Wheeter, B ;
Wyatt, P ;
Keast, CL ;
Snyder, J ;
Larson, J .
IEEE ELECTRON DEVICE LETTERS, 2004, 25 (04) :220-222