Hexagonal boron nitride nanowalls: physical vapour deposition, 2D/3D morphology and spectroscopic analysis

Hexagonal boron nitride nanowalls were synthesized using reactive radio-frequency magnetron sputtering in combination with a hexagonal BN target. The nanowall formation is purely governed by addition of hydrogen to the nitrogen/argon gas mixture, and leads to a decreased incorporation of carbon and oxygen impurities. The surface morphology is assessed with scanning electron microscopy, while stoichiometry and reduced impurity content of the material was evidenced using Rutherford backscattering spectroscopy. Transmission electron microscopy confirms the hexagonal nature of the nanowalls, whose luminescent properties are studied with cathodoluminescence spectroscopy, shedding more light on the location and nature of the excitonic emission and crystalline quality of the h-BN nanowalls.