Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering

被引:0
作者
Wu, Yuebo [1 ,2 ]
Huang, Bo [2 ,3 ]
Zhang, Liangtang [1 ]
Wu, Suntao [2 ]
机构
[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Fujian, Peoples R China
[2] Xiamen Univ, Pen Tung Sah Mems Res Ctr, Xiamen 361005, Peoples R China
[3] Xiamen Univ, Dept Phys, Xiamen 361005, Peoples R China
来源
THIN FILM PHYSICS AND APPLICATIONS, SIXTH INTERNATIONAL CONFERENCE | 2008年 / 6984卷
关键词
AZO film; annealing; XRD; SEM; transmittance;
D O I
10.1117/12.792374
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The Al-doped ZnO (AZO) films were deposited on the glass substrates by RF magnetron sputtering. After the deposition, the films were annealed in N-2 at several temperatures from 500 degrees C to 800 degrees C for 60 minutes respectively. The crystal structures of the AZO films were characterized and analyzed by X-ray diffraction. The surface morphologies of the films were observed by SEM. The transmission spectra of the films were measured using a spectrophotometer within the range from 200 to 800 nm at room temperature. The results indicate each of the films has a preferential c-axis orientation and the grain size increases with annealing temperature increasing. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics.
引用
收藏
页数:4
相关论文
共 16 条
[11]   Optical and electrical properties of aluminum-doped ZnO thin films grown by pulsed laser deposition [J].
Liu, Yaodong ;
Lian, Jianshe .
APPLIED SURFACE SCIENCE, 2007, 253 (07) :3727-3730
[12]   A comprehensive review of ZnO materials and devices -: art. no. 041301 [J].
Ozgür, U ;
Alivov, YI ;
Liu, C ;
Teke, A ;
Reshchikov, MA ;
Dogan, S ;
Avrutin, V ;
Cho, SJ ;
Morkoç, H .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (04) :1-103
[13]   Characterization of ZnO:Al thin films obtained by spray pyrolysis technique [J].
Rozati, S. M. ;
Akesteh, Sh. .
MATERIALS CHARACTERIZATION, 2007, 58 (04) :319-322
[14]   Characteristics of Al-doped c-axis orientation ZnO thin films prepared by the sol-gel method [J].
Xu, ZQ ;
Deng, H ;
Li, Y ;
Guo, QH ;
Li, YR .
MATERIALS RESEARCH BULLETIN, 2006, 41 (02) :354-358
[15]   Effects of annealing and dopant concentration on the optical characteristics of ZnO: Al thin films by sol-gel technique [J].
Xue, S. W. ;
Zu, X. T. ;
Zheng, W. G. ;
Chen, M. Y. ;
Xiang, X. .
PHYSICA B-CONDENSED MATTER, 2006, 382 (1-2) :201-204
[16]   Growth and properties of ZnO nanotubes grown on Si(111) substrate by plasma-assisted molecular beam epitaxy [J].
Yan, JF ;
Lu, YM ;
Liang, HW ;
Liu, YC ;
Li, BH ;
Fan, XW ;
Zhou, JM .
JOURNAL OF CRYSTAL GROWTH, 2005, 280 (1-2) :206-211