Graphitization of amorphous diamond-like carbon films by laser irradiation

被引：16

作者：

Grigonis, Alfonsas ^{[1
]}

Medvid, Artur ^{[2
]}

Onufrijevs, Pavels ^{[2
]}

Babonas, Jurgis ^{[3
]}

Reza, Alfonsas ^{[3
]}

机构：

[1] Kaunas Univ Technol, Dept Phys, LT-3031 Kaunas, Lithuania

[2] Riga Tech Univ, LV-1048 Riga, Latvia

[3] Inst Semicond Phys, LT-01108 Vilnius, Lithuania

来源：

OPTICAL MATERIALS | 2008年 / 30卷 / 05期

关键词：

amorphous diamond-type carbon films; laser irradiation; optical properties;

D O I：

10.1016/j.optmat.2007.02.027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous diamond-like hydrogenated carbon, or a-C:H, films were deposited on Si wafers by means of direct ion beam deposition from acetylene or from a gaseous mixture of acetylene and hydrogen. The samples were irradiated by the second harmonic (lambda = 532 nm) of a Q-switched YAG:Nd laser. The effect of laser irradiation was studied with Raman and infrared spectroscopy and spectroscopic ellipsometry. Changes in the optical spectra of samples of various H content were investigated depending on laser intensity. Experimental data were interpreted taking into account the structural transformations of a-C:H films. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：749 / 752

页数：4

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