Spatio-temporal sampling of the coherence function for step height measurements

被引：1

作者：

Falldorf, Claas ^{[1
]}

Hyra, Andreas ^{[1
]}

Simic, Aleksander ^{[1
]}

Bergmann, Ralf B. ^{[1
,2
,3
]}

机构：

[1] BIAS, Klagenfurter Str 5, D-28359 Bremen, Germany

[2] Univ Bremen, MAPEX Ctr Mat & Proc, Otto Hahn Allee 1, D-28359 Bremen, Germany

[3] Fac Phys & Elect Engn, Otto Hahn Allee 1, D-28359 Bremen, Germany

来源：

INTERFEROMETRY XIX | 2018年 / 10749卷

关键词：

Coherence; Coherence function; Optical Metrology; Shear Interferometry; Nomarski Microscope; SHEARING INTERFEROMETRY;

D O I：

10.1117/12.2321145

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present an approach to measure step heights based on a combination of white light interferometry and shear interferometry. The method employs a shear interferometer and makes use of temporally low coherent illumination. It is capable of measuring height differences between two positions on an objects surface which are separated by the shear. Similar to white light interferometry, the measurement is achieved by sampling the coherence function along the temporal dimension. In contrast to white light interferometry, the method is intrinsically robust against mechanical distortions due to the common path nature of the shear interferometer.

引用

页数：8

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