CHEMICAL-VAPOR-DEPOSITION;
RAY PHOTOELECTRON-SPECTROSCOPY;
TANTALUM;
INTEGRATION;
BARRIER;
SILICON;
LAYERS;
XPS;
D O I:
10.1021/jp102986f
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
We present a detailed study of processes and interactions occurring during the Fe-catalyzed chemical vapor deposition of carbon nanotubes on metallic Ta supports. In situ X-ray photoemission spectroscopy and X-ray diffraction show that the Fe catalyst increases the reactivity of Ta toward oxidation and carbide formation, whereas Ta promotes the reduction of Fe. This causes an unusual temperature dependence of carbon nanotube growth, where at low temperatures (similar to 550 degrees C) vertically aligned forests of carbon nanotubes with ohmic contacts grow readily on metallic Ta, whereas at high temperatures (>600 degrees C) nanotube growth is sparse because of the diffusion of Fe away from the surface through grain boundaries of in situ formed polycrystalline Ta2O5. The Fe-Ta model system highlights general material selection criteria for nanotube applications that require a conductive support.
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Univ Dayton, Res Inst, Dayton, OH 45469 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Amama, Placidus B.
Pint, Cary L.
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Pint, Cary L.
Kim, Seung Min
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Kim, Seung Min
McJilton, Laura
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
McJilton, Laura
Eyink, Kurt G.
论文数: 0引用数: 0
h-index: 0
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Eyink, Kurt G.
Stach, Eric A.
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Stach, Eric A.
Hauge, Robert H.
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Hauge, Robert H.
Maruyama, Benji
论文数: 0引用数: 0
h-index: 0
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Bouchet-Fabre, B.
Djomkam, A. Fadjie
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Djomkam, A. Fadjie
Delmas, M.
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Delmas, M.
Jin, C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Jin, C.
Antonin, O.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Antonin, O.
Hugon, M. C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Hugon, M. C.
Mayne-L'Hermite, M. F.
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Mayne-L'Hermite, M. F.
Alvarez, F.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP, BrazilUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Alvarez, F.
Minea, T.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Univ Dayton, Res Inst, Dayton, OH 45469 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Amama, Placidus B.
Pint, Cary L.
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Pint, Cary L.
Kim, Seung Min
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Kim, Seung Min
McJilton, Laura
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
McJilton, Laura
Eyink, Kurt G.
论文数: 0引用数: 0
h-index: 0
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Eyink, Kurt G.
Stach, Eric A.
论文数: 0引用数: 0
h-index: 0
机构:
Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Stach, Eric A.
Hauge, Robert H.
论文数: 0引用数: 0
h-index: 0
机构:
Rice Univ, Dept Phys, Dept Chem, Houston, TX 77251 USA
Rice Univ, Richard E Smalley Inst Nanoscale Sci & Technol, Houston, TX 77251 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
Hauge, Robert H.
Maruyama, Benji
论文数: 0引用数: 0
h-index: 0
机构:
USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USAUSAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Bouchet-Fabre, B.
Djomkam, A. Fadjie
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Djomkam, A. Fadjie
Delmas, M.
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Delmas, M.
Jin, C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Jin, C.
Antonin, O.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Antonin, O.
Hugon, M. C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Hugon, M. C.
Mayne-L'Hermite, M. F.
论文数: 0引用数: 0
h-index: 0
机构:
CEA Saclay, CEA, CNRS,URA 2453, Serv Photons Atomes & Mol,Lab Francis Perrin, F-91191 Gif Sur Yvette, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Mayne-L'Hermite, M. F.
Alvarez, F.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP, BrazilUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
Alvarez, F.
Minea, T.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, FranceUniv Paris 11, CNRS, UMR 8578, Phys Gaz & Plasmas Lab, F-91405 Orsay, France