Fabrication of continuous phase plates based on bonnet polishing

被引:1
作者
Zhong Bo [1 ]
Chen Xian-hua [1 ]
Deng Wen-hui [1 ]
Zheng Nan [1 ]
Wen Sheng-lin [1 ]
机构
[1] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China
来源
OPTIFAB 2019 | 2019年 / 11175卷
基金
中国国家自然科学基金;
关键词
bonnet polishing; continuous phase plate; tool influence function;
D O I
10.1117/12.2536464
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Continuous phase plate (CPP) is the vital diffractive optical element in large laser devices. It is extremely difficult to manufacture owing to its random and small feature structures. Bonnet polishing (BP) has obvious advantage of high efficiency, and is widely uesd in manufacturing process of large optics. In the paper, BP techniques have been developed to manufacture CPP. Firstly, the relationship between the process parameters and tool influence functions (TIFs) has been analyzed, and the adjustable ranges of TIF size and efficiency have been determined. Then, a surface topography simulation model has been established to forecast CPP residual errors. Based on the model, the influence of TIF size on the processing precision and efficiency of CPP has been simulated and analyzed; meanwhile the optimized TIFs have been determined. Finally, an experiment has been carried out by a 300mmx300mm CPP element. The result has shown that the residual root-mean-square (RMS) of CPP is 26 nm. Based on the optimized TIFs of BP, it has been realized the high-efficient and high-precision processing of CPP in this paper, and a new technical reference for the CPP manufacturing has been provided simultaneously.
引用
收藏
页数:7
相关论文
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