Polyimide planarization for RF-MEMS switches on PCB

被引：0
|
作者：
Ghodsian, B [1 ]
Jung, C [1 ]
Cetiner, BA [1 ]
De Flaviis, F [1 ]
机构：
[1] Univ Calif Irvine, Dept Elect & Comp Engn, Irvine, CA 92697 USA
来源：
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年
关键词：
RF-MEMS switch; PCB; polyimide;
D O I：
10.1109/ICSENS.2004.1426238
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This abstract describes an improved manufacturing technology for fabrication of RF-MEMS switches on PCB. The 17.5 mu m thick copper layer is patterned and planarized using polyimide. The use of polyimide reduces formation of voids in sacrificial photoresist. Fabricated switches demonstrate low insertion-loss (< 0.06dB at 10GHz) and good isolation (> 20dB at 10GHz).
引用
收藏
页码：605 / 606
页数：2
相关论文
共 50 条
  • [1] Development of RF-MEMS switch on PCB substrates with polyimide planarization
    Ghodsian, B
    Jung, CW
    Cetiner, BA
    De Flaviis, F
    IEEE SENSORS JOURNAL, 2005, 5 (05) : 950 - 955
  • [2] Planarization optimization of RF-MEMS switches with a gold membrane
    Villeneuve, C.
    Pons, P.
    Puyal, V.
    Plana, R.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (06)
  • [3] Fabrication and Testing of RF-MEMS Switches Using PCB Techniques
    Silva, M. W. B.
    Barbin, S. E.
    Kretly, L. C.
    2009 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE (IMOC 2009), 2009, : 91 - +
  • [4] RF-MEMS switches with AlN dielectric and their applications
    Badia, Montserrat Fernandez-Bolanos
    Nicole, Pierre
    Ionescu, Adrian Mihai
    INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 2011, 3 (05) : 509 - 520
  • [5] Charging in Dielectricless Capacitive RF-MEMS Switches
    Mardivirin, David
    Pothier, Arnaud
    Crunteanu, Aurelian
    Vialle, Bastien
    Blondy, Pierre
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2009, 57 (01) : 231 - 236
  • [6] Acceleration of Microwelding on Ohmic RF-MEMS Switches
    Tazzoli, Augusto
    Meneghesso, Gaudenzio
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (03) : 552 - 554
  • [7] RF-MEMS switches for reconfigurable integrated circuits
    Brown, ER
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1998, 46 (11) : 1868 - 1880
  • [8] Thermal cycling reliability of RF-MEMS switches
    Mulloni, V.
    Sordo, G.
    Margesin, B.
    SMART SENSORS, ACTUATORS, AND MEMS VII; AND CYBER PHYSICAL SYSTEMS, 2015, 9517
  • [9] RF-MEMS switches: Paradigms of microwave switching
    Mollah, MN
    Karmakar, NC
    APMC 2001: ASIA-PACIFIC MICROWAVE CONFERENCE, VOLS 1-3, PROCEEDINGS, 2001, : 1024 - 1027
  • [10] Piezoelectric actuation for application in RF-MEMS switches
    Klaasse, G
    Puers, B
    Tilmans, HAC
    MEMS, MOEMS, AND MICROMACHINING, 2004, 5455 : 174 - 180
12345