Optimization of semiconductor dew point hygrometer mirrors surface temperature homogeneity

被引：4

作者：

Weremczuk, J

Gniazdowski, Z

Lysko, JM

Jachowicz, RS

机构：

[1] Warsaw Univ Technol, ISE, PL-00665 Warsaw, Poland

[2] Inst Electron Technol, PL-02668 Warsaw, Poland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 92卷 / 1-3期

关键词：

dew point hygrometer; semiconductor hygrometer; FEM temperature simulation;

D O I：

10.1016/S0924-4247(01)00533-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The temperature homogeneity on the dew point hygrometer mirror is one of the most important factor effected on measurement accuracy. The semiconductor mirror structure facilitated with thermoresistor, two heaters and with additional dew/frost detector has been computer simulated for recognition of temperature distribution on its surface. Two detector structures, the first one located on silicon membrane and the second placed on bulk materials have been compared in the paper. The analysis of optimal heating power applied to heaters to achieve homogenous detector surface temperature distribution has been presented in the report. Finally, the simulation results have been compared with measurement results. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：10 / 15

页数：6