An improved three-dimensional model for growth of oxide films induced by laser heating

被引:12
作者
Pérez, JLJ
Sakanaka, PH
Algatti, MA
Mendoza-Alvarez, JG
Orea, AC
机构
[1] IPN, CICATA, Mexico City, DF, Mexico
[2] Univ Estadual Campinas, Inst Fis, BR-13083970 Campinas, SP, Brazil
[3] UNESP, Guaratingueta, SP, Brazil
[4] IPN, CINVESTAV, Dept Fis, Mexico City 07300, DF, Mexico
基金
巴西圣保罗研究基金会;
关键词
laser induced oxidation; thin oxide films; laser materials processing;
D O I
10.1016/S0169-4332(01)00143-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper we consider a three-dimensional hear diffusion model to explain the growth of oxide films which takes place when a laser beam is shined on and heats a metallic layer deposited on a glass substrate in a normal atmospheric environment. In particular, we apply this model to the experimental results obtained for the dependence of the oxide layer thickness on the laser density power for growth of TiO2 films grown on Ti-covered glass slides. We show that there is a very good agreement between the experimental results and the theoretical predictions from our proposed three-dimensional model. improving the results obtained with the one-dimensional heat diffusion model previously reported. Our theoretical results also show the occurrence of surface cooling between consecutive laser pulses, and that the oxide track surface profile closely follows the spatial laser profile indicating that heat diffusive effects can be neglected in the growth of oxide films by laser heating, (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:703 / 708
页数:6
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