IN SITU XPS CHARACTERIZATION OF DIAMOND FILMS AFTER Ar+ CLUSTER ION BEAM SPUTTERING

被引：0

作者：

Artemenko, Anna ^{[1
]}

Babchenko, Oleg ^{[1
]}

Kozak, Halyna ^{[1
]}

Ukraintsev, Egor ^{[1
]}

Izak, Tibor ^{[1
]}

Romanyuk, Oleksander ^{[1
]}

Potocky, Stepan ^{[1
]}

Kromka, Alexander ^{[1
]}

机构：

[1] Acad Sci Czech Republ, Inst Phys, Prague, Czech Republic

来源：

NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION | 2015年

关键词：

Diamond; depth profiling; XPS; sputtering; Raman;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Diamond films are attractive materials for electronics, optics and medical applications. For these applications diamond film quality and controllable surface composition are often crucial parameters. In this work, in situ XPS analysis of chemical composition of H-and O-terminated nano- and microcrystalline diamond (NCD and MCD) films before and after their sputtering by the Ar+ cluster ion beam was investigated. Scanning electron microscopy confirmed sputtering of all diamond surfaces with a rate about 0.5 +/- 0.2 nm / min. Raman spectroscopy and XPS revealed surface graphitization of diamond surface (transformation of sp(3) carbon phase to sp(2)) induced by sputtering. Moreover, XPS data showed the presence of about 0.7 % of Ar atoms on the investigated diamond surface after 66 min of sputtering. Also, oxygen residuals (0.2 at. %) were still presented on the H-NCD surface after 66 min of sputtering. In contrast, no oxygen was found on the H-MCD surface just after 2 min of sputtering (in the depth about 1.5 nm). Surface composition is discussed in respect to the diamond films growth parameters and surface structure.

引用

页码：605 / 610

页数：6

共 15 条

[1] Amination of NCD Films for Possible Application in Biosensing [J].

Artemenko, Anna ;

Kozak, Halyna ;

Biederman, Hynek ;

Choukourov, Andrei ;

Kromka, Alexander .

PLASMA PROCESSES AND POLYMERS, 2015, 12 (04) :336-346

[2]

Babchenko O, 2014, ADV SCI ENG MED, V6, P802, DOI DOI 10.1166/ASEM.2014.1572

[3]

FERRARI C., PHYS REV B, V63

[4]

Funer M, 1998, APPL PHYS LETT, V72, P1149, DOI 10.1063/1.120997

[5] Depth profiling of nitrogen within 15N-incorporated nano-crystalline diamond thin films [J].

Garratt, E. ;

AlFaify, S. ;

Cassidy, D. P. ;

Dissanayake, A. ;

Mancini, D. C. ;

Ghantasala, M. K. ;

Kayani, A. .

APPLIED PHYSICS LETTERS, 2013, 103 (13)

[6] Hydrogen depth-profiling in chemical-vapor-deposited diamond films by high-resolution elastic recoil detection [J].

Kimura, K ;

Nakajima, K ;

Yamanaka, S ;

Hasegawa, M ;

Okushi, H .

APPLIED PHYSICS LETTERS, 2001, 78 (12) :1679-1681

[7] Linear antenna microwave plasma CVD deposition of diamond films over large areas [J].

Kromka, A. ;

Babchenko, O. ;

Izak, T. ;

Hruska, K. ;

Rezek, B. .

VACUUM, 2012, 86 (06) :776-779

[8] Osteogenic cell differentiation on H-terminated and O-terminated nanocrystalline diamond films [J].

Liskova, Jana ;

Babchenko, Oleg ;

Varga, Marian ;

Kromka, Alexander ;

Hadraba, Daniel ;

Svindrych, Zdenek ;

Burdikova, Zuzana ;

Bacakova, Lucie .

INTERNATIONAL JOURNAL OF NANOMEDICINE, 2015, 10 :869-884

[9] Incorporation of lithium and nitrogen into CVD diamond thin films [J].

Othman, M. Zamir ;

May, Paul W. ;

Fox, Neil A. ;

Heard, Peter J. .

[10] Implantation of keV-energy argon clusters and radiation damage in diamond [J].

Popok, V. N. ;

Samela, J. ;

Nordlund, K. ;

Popov, V. P. .

PHYSICAL REVIEW B, 2012, 85 (03)

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