Micro milling technologies for MEMS

被引:0
作者
Wang, Jinsheng [1 ,2 ]
Gong, Yadong [1 ]
Abba, Garbriel [2 ]
Cao, Jianfeng [1 ]
Shi, Jiashun [1 ]
Cai, Guangqi [1 ]
机构
[1] Northeastern Univ, Lab Adv Mfg & Automat, PO 319, Shenyang 110004, Liaoning, Peoples R China
[2] Univ Metz, CEMA, LGIPM, F-57045 Metz 01, France
来源
PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN | 2007年
关键词
MEMS; micro milling; cutting principles; minimum chip thickness; microstructure;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, a comprehensive introduction comprehensive introduction of micro milling principles of micro milling technology, which is a novel research. Knowing the micro milling principles clearly is very micro-manufactu ring technology to fabricate many materials with complex 3D and high aspect ratio structure, pivotal to decide the micro milling parameters and fabricate is presented. Compared with some other dedicate MENIS devices. In the fourth part, our research micro-manufactu ring technologies, micro milling has a lot of merits, such as low cost, flexibility. The machine tool, nowadays about the micro milling principles research is given. micro mills, and monitoring devices are the key technologies, and the micro milling principles with. attention to minimum chip thickness and workpiece microstructure influences are presented primarily. At last, our research in micro milling field is given.
引用
收藏
页码:86 / +
页数:4
相关论文
共 26 条
  • [1] ALTING L, 2003, ANN CIRP, V52
  • [2] 5-axis micro milling machine for machining micro parts
    Bang, YB
    Lee, KM
    Oh, S
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2005, 25 (9-10) : 888 - 894
  • [3] BENAVIDES GL, 2001, SCANDING REPORT
  • [4] Investigation of micro-cutting operations
    Chae, J
    Park, SS
    Freiheit, T
    [J]. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2006, 46 (3-4) : 313 - 332
  • [5] FILIZ S, 2006, INT J MACH TOOL MANU, P1
  • [6] Friedrich C. R., 1996, Microsystem Technologies, V2, P144, DOI 10.1007/s005420050032
  • [7] Influence of microstructure on surface integrity in turning - part II: the influence of a microstructure of the workpiece material on cutting forces
    Grum, J
    Kisin, M
    [J]. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2003, 43 (15) : 1545 - 1551
  • [8] Scanning grating microinterferometer for MEMS metrology
    Kim, B
    Schmittdiel, MC
    Degertekin, FL
    Kurfess, TR
    [J]. JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2004, 126 (04): : 807 - 812
  • [9] Dynamic analysis of a mesoscale machine tool
    Lee, SW
    Mayor, R
    Ni, J
    [J]. JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2006, 128 (01): : 194 - 203
  • [10] Development of a six-degree-of-freedom geometric error measurement system for a meso-scale machine tool
    Lee, SW
    Mayor, R
    Ni, J
    [J]. JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2005, 127 (04): : 857 - 865