Comparison of the effects of 60 nm and 96 nm thick patterned permalloy thin films on the performance of on-chip spiral inductors

被引:9
作者
Pulijala, Vasu [1 ]
Syed, Azeemuddin [1 ]
机构
[1] IIIT Hyderabad, CVEST, Hyderabad 500032, Andhra Pradesh, India
关键词
Inductor; Permalloy; Domain wall; Thickness; DOMAINS;
D O I
10.1016/j.jmmm.2016.06.031
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In our earlier work it was shown that the 60 nm domain patterned Permalloy, incorporated on on-chip spiral inductors, gave better performance at frequencies greater than 5 GHz compared to the bulk Permalloy incorporated inductors, and the control structure. In this paper we compare the effects of 60 nm and 96 nm thick domain patterned Permalloy thin films, on the performance of on-chip spiral inductors. Experimental results show that the 60 nm thick both bulk and patterned Permalloys provide more improvement in inductance and quality factor of inductors, compared to that of 96 nm. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:245 / 248
页数:4
相关论文
共 21 条
[1]  
[Anonymous], OOMMF OBJECT ORIENTE
[2]   Stray fields of domains in permalloy microstructures - Measurements and simulations [J].
Barthelmess, M ;
Pels, C ;
Thieme, A ;
Meier, G .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (10) :5641-5645
[3]   Tuning the permeability of permalloy films for on-chip inductor applications [J].
Dastagir, Tawab ;
Xu, Wei ;
Sinha, Saurabh ;
Wu, Hao ;
Cao, Yu ;
Yu, Hongbin .
APPLIED PHYSICS LETTERS, 2010, 97 (16)
[4]  
Gardner D.S., 2006, Electron Devices Meeting, P1
[5]   Review of On-Chip Inductor Structures With Magnetic Films [J].
Gardner, Donald S. ;
Schrom, Gerhard ;
Paillet, Fabrice ;
Jamieson, Brice ;
Karnik, Tanay ;
Borkar, Shekhar .
IEEE TRANSACTIONS ON MAGNETICS, 2009, 45 (10) :4760-4766
[6]   Integrated on-chip inductors using magnetic material (invited) [J].
Gardner, Donald S. ;
Schrom, Gerhard ;
Hazucha, Peter ;
Paillet, Fabrice ;
Karnik, Tanay ;
Borkar, Shekhar ;
Hallstein, Roy ;
Dambrauskas, Tony ;
Hill, Charles ;
Linde, Clark ;
Worwag, Wojciech ;
Baresel, Robert ;
Muthukumar, Sriram .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
[7]   The Inductance Enhancement Study of Spiral Inductor Using Ni-AAO Nanocomposite Core [J].
Hsu, M. C. ;
Chao, T. Y. ;
Cheng, Y. T. ;
Liu, C. M. ;
Chen, C. .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2009, 8 (03) :281-285
[8]   Permalloy patterning effects on RF inductors [J].
Ni, Weiping ;
Kim, Jinsook ;
Kan, Edwin C. .
IEEE TRANSACTIONS ON MAGNETICS, 2006, 42 (10) :2827-2829
[9]   Performance Boost of Spiral Inductors With Thickness-Controlled Domain-Patterned Permalloy [J].
Pulijala, Vasu ;
Syed, Azeemuddin .
IEEE TRANSACTIONS ON MAGNETICS, 2015, 51 (05)
[10]  
Pulijala V, 2013, EUR MICROW CONF, P782