Simulation and Characterization of Dynamic Contact in a MEMS Passive Vibration Threshold Sensor

被引：0

作者：

Yang, Zhuoqing ^{[1
]}

Chen, Wenguo ^{[1
]}

Ding, Guifu ^{[1
]}

Wang, Yan ^{[1
]}

Wang, Hong ^{[1
]}

Zhao, Xiaolin ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai, Peoples R China

来源：

2014 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2014年

关键词：

MEMS; micromachining; vibration threshold sensor; dynamic contact; dropping hammer test; METAL-ELECTROPLATING TECHNOLOGY; SWITCHES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-machined passive vibration threshold sensor (i.e. acceleration switch) with a compliant stationary electrode has been designed, simulated and characterized. Bridge-type elastic beams as the compliant stationary electrode are adopted to improve the contact effect of the sensor. The dynamic contact between the two electrodes is simulated and analyzed by finite-element method (FEM). It is presented that a 'skip contact' phenomenon occurred during the switching on, which has been described and successfully explained in this paper. A drop hammer test of the fabricated vibration threshold sensor was done, which is in accordance with the simulated one. The measured two contact times in the skip contact are 16 mu s and 4 mu s under 55g applied acceleration shock, respectively, which are in agreement with simulated results.

引用

页码：298 / 302

页数：5

共 9 条

[1] MICROMINIATURE GANGED THRESHOLD ACCELEROMETERS COMPATIBLE WITH INTEGRATED-CIRCUIT TECHNOLOGY [J].